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An automated precision gas sensor characterization system

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6 Author(s)
Zhenan Tang ; Dept. of Electron. Eng., Dalian Univ. of Technol., China ; Wong, D.T.W. ; Chan, Philip C.H. ; Sin, J.K.O.
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The automated gas sensor characterization system is designed for precision characterization of integrated or discrete gas sensors. Gas metering and data acquisition are computer controlled. Calibration of the gas concentration is carried out through the use of a gas analyzer or gas chromatography (GC). The system has been used to characterize two types of commercial gas sensors. The transient response of the gas sensors is therefore measured when the system first reaches equilibrium and then heating current is applied to heat up the sensor from the chamber ambient temperature to the sensor operating temperature. Details of experimental results for static and dynamic characterization of various commercial gas sensors are presented

Published in:

Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on

Date of Conference:

6-10 Nov 1995

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