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Development of a novel micro FIA-ISFET integrated sensor

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4 Author(s)
Niu Mengnian ; Inst. of Metall., Acad. Sinica, Shanghai, China ; Ding Xinfang ; Tao Xiang ; Lin Wei

Based on the principle of flow injection analysis (FIA), this paper reports a novel micro FIA-ISFET integrated sensor. Four pairs of long-arm pH-ISFET/REFET units and symmetric Ti/Au film pseudo-reference electrodes are integrated on the chip, so that an integrated configuration of transducer and micro flow-through cell is achieved. The chip size of the sensor is 6*8mm2. Initial experimental results indicate that the liquid can be measured driven by peristaltic pump flows with great fluency and that the amount of test sample needed in dynamic measurement is greatly reduced. The integrated sensor has quick response and its reliability and stability are considerably improved

Published in:

Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on

Date of Conference:

6-10 Nov 1995