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Design of an atom‐cluster generator for a transmission electron microscope and in situ observation of the deposition process of large atom clusters

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4 Author(s)
Mori, H. ; Research Center for Ultra‐High Voltage Electron Microscopy, Osaka University, Yamadaoka, Suita, Osaka 565, Japan ; Fujii, K. ; Komatsu, M. ; Miyauchi, K.

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An atom‐cluster generator which can be set in the specimen chamber of a transmission electron microscope has been designed and constructed. The generator essentially consists of two vacuum chambers; one is the chamber for differential pumping and the other the cluster source chamber. The former plays an essential role in keeping the column of a microscope in a high vacuum. The latter is kept in a gas atmosphere and nm‐sized metal clusters are produced in this chamber by evaporating a metal element from a tungsten filament. With this apparatus, preliminary in situ deposition experiments were carried out, and it was observed that isolated gold clusters, ejected from the atom‐cluster generator, landed sequentially on a substrate.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:12 ,  Issue: 4 )

Date of Publication:

Jul 1994

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