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A micro silicon hot-wire anemometer

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6 Author(s)
Mischler, M. ; Dept. of Mech. Aerosp. & Nucl. Eng., California Univ., Los Angeles, CA, USA ; Fan-Gang Tseng ; Ulmanella, U. ; Chih-Ming Ho
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A new micromachined hot-wire anemometer has been developed. Extensive tests of the anemometer's dependence on ambient temperature, over-heat ratio, and sensor length have been finalized. Due to its extremely small size, micromachined hot-wire has better sensitivity, temporal and spatial resolutions than the conventional hot-wire. Because of the large bandwidth (MHz), velocity fluctuations at high Reynolds number flow can be measured

Published in:

Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on

Date of Conference:

6-10 Nov 1995

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