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Optical projection system for gigabit dynamic random access memories

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5 Author(s)
Jeong, H. ; Ultratech Stepper, Inc., Santa Clara, California 95054 ; Markle, D.A. ; Owen, G. ; Pease, R.F.W.
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Containing the cost of new generations of optical lithography, while maintaining improvements in performance, is a major challenge because every three years tends to see a requirement for a three‐fold increase in the number of resolvable pixels and a substantial improvement in resolution. Here an optical approach is reported that promises to ameliorate the rapidly increasing cost of optical systems through the means of 1×, mostly reflecting optics. Only three projective components are required and the spectral range is 1000× larger than that of corresponding refractive systems. Such a system appears capable of meeting the lithography requirements of the 256 Mbit dynamic random access memory (DRAM) and, with evolutionary improvements, the 1 Gbit DRAM.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:11 ,  Issue: 6 )