Cart (Loading....) | Create Account
Close category search window
 

Transmission electron microscopy specimen preparation technique using focused ion beam fabrication: Application to GaAs metal–semiconductor field effect transistors

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Yamaguchi, A. ; Analytical Characterization Center, Sumitomo Electric Industries, Ltd., 1‐1‐3, Shimaya, Konohana‐ku, Osaka 554, Japan ; Shibata, Masahiro ; Hashinaga, Tatsuya

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.586536 

A specimen preparation technique using a focused ion beam to generate cross‐sectional transmission electron microscopy (TEM) samples of GaAs integrated circuits (ICs) was studied. Using a two axes tilting technique it was possible to prepare sample with minimal thickness (∼10 nm) to enhance spatial resolution in TEM and x‐ray spectrometer analysis. This method was applied for failure analysis of degraded GaAs ICs. The interfacial microstructure between the gate metallization and the GaAs substrate, caused by high temperature operation, was also investigated

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:11 ,  Issue: 6 )

Date of Publication:

Nov 1993

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.