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Sensitivity of the focusing property of optimized electrostatic lenses

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2 Author(s)
Bodrogi, P. ; Institute for Solid State Physics, Eötvös University, H‐1088 Budapest, Múzeum krt. 6‐8, Hungary ; Szep, J.

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The optical properties of a given axially symmetric electrostatic multielectrode lens were examined by changing its external parameters (source parameters, object‐side and image‐side potentials, and working distances, etc.) and optimizing the electrode potentials of the lens for each considered value of an external parameter. Our main result is the discovery of the tendencies how the optimal total beam radius depends on the external parameters, i.e., the sensitivity of the optimum related to the change of the external parameters. We established that the external parameters can be distinguished clearly from each other on the basis of the scale of the sensitivity of the optimum related to them.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:11 ,  Issue: 4 )