Cart (Loading....) | Create Account
Close category search window
 

Fabrication of submicron apertures in thin membranes of silicon nitride

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Amar, A. ; Physics Department, University of California, Berkeley, California 94720 ; Lozes, R.L. ; Sasaki, Y. ; Davis, J.C.
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.586667 

A technique for manufacturing submicron apertures used for investigating hydrodynamic quantum phenomena in the superfluids 4He and 3He is described. The apertures are fabricated in ∼100 nm thick suspended membranes of silicon nitride by using e‐beam lithography and reactive ion etching.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:11 ,  Issue: 2 )

Date of Publication:

Mar 1993

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.