Cart (Loading....) | Create Account
Close category search window
 

Focused ion beam observation of grain structure and precipitates in aluminum thin films

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Barr, D.L. ; AT&T Bell Laboratories 600 Mountain Avenue, Murray Hill, New Jersey 07974 ; Harriott, L.R. ; Brown, W.L.

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.585941 

Reliability in very large scale integrated circuits is strongly dependent on the grain structure of the aluminum metallization used in interconnection between devices on a chip. Commonly used techniques for grain metrology require the use of time consuming sample preparation. Focused ion beam microscopy is well suited to studying grain size and structure because it needs little or no sample preparation and can give information about grain structure throughout the typical 0.5–1 μm thickness of aluminum films. Measurements of grain size and observations of precipitates in aluminum metallization by using focused ion beam are presented.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:10 ,  Issue: 6 )

Date of Publication:

Nov 1992

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.