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Identification of the facet planes of phase I TiO2(001) rutile by scanning tunneling microscopy and low energy electron diffraction

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3 Author(s)
Poirier, G.E. ; Department of Chemistry, University of Texas at Austin, Austin, Texas 78712 ; Hance, B.K. ; White, J.M.

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The thermal faceting of TiO2(001) rutile was studied in ultrahigh vacuum using scanning tunneling microscopy (STM), Auger electron spectroscopy, and low energy electron diffraction (LEED). The predominant facet planes observed by STM after annealing to 510 °C were (011) and stepped (011), in agreement with the LEED work of Firment. The step structure on (011) planes is indicative of facet growth by surface migration. A smaller number of (114) and (111) planes were observed, in agreement with the work of Firment and Tait and Kasowski. Facet structures resembling those proposed by Kurtz, based on electron simulated desorption ion angular distribution results, were observed for the (011) planes.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:10 ,  Issue: 1 )