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Micromachined rectangular coaxial line and cavity resonator for 77 GHz applications using SU8 photoresist

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4 Author(s)
Maolong Ke ; Sch. of Eng., Univ. of Birmingham, Birmingham ; Yi Wang ; Jiang, K. ; Lancaster, M.J.

Thick SU8 photoresist technique is used to fabricate two millimetre-wave components. Firstly, an air-filled rectangular coaxial line operating from 55 to 87 GHz is fabricated and tested, and an insertion loss of 0.8 dB and return loss of better than -15 dB was obtained. The overall measured responses agree well with full-wave simulation results. Secondly, a cavity resonator operating at 77 GHz is reported. An unloaded Q value of 569 was obtained, which is, to our knowledge, one of the best reported so far in a similar structure.

Published in:

Microwave Conference, 2008. APMC 2008. Asia-Pacific

Date of Conference:

16-20 Dec. 2008