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Ion interaction with solids: Surface texturing, some bulk effects, and their possible applications

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1 Author(s)
Auciello, O. ; Institute for Aerospace Studies, University of Toronto, Downsview, Ontario, M3H 5T6, Canada

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Texturing of surfaces and some bulk effects produced during ion‐solid interactions already are or have the potential to be useful and/or important in several different technologies, and/or experimental techniques, namely: (a) controlled thermonuclear fusion and vacuum technologies, (b) microelectronics, (c) surface acoustical and optical technologies, (d) solar energy conversion technology, (e) thin film technology, (f) biomedicine (implantology), (g) ion beam surface analysis, (h) field ion emission and electron microscopy, (i) surface enhanced Raman scattering spectroscopy, and (j) other technologies. In some cases texturing is desirable while the opposite is true for other situations. A review is presented on the possible technological applications of textured surfaces and some bulk effects produced when ion and electromagnetic radiations interact with solids in an attempt to bring together information which is dispersed among journals involving fields of research which are sometimes unrelated. Additionally, a critical analysis of the underlying physics of some phenomena is presented.

Published in:

Journal of Vacuum Science and Technology  (Volume:19 ,  Issue: 4 )