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13.5 nm extreme ultraviolet emission from tin based laser produced plasma sources

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7 Author(s)
Hayden, Paddy ; School of Physics, University College Dublin, Belfield, Dublin 4, Ireland ; Cummings, Anthony ; Murphy, Nicola ; OSullivan, Gerry
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An examination of the influence of target composition and viewing angle on the extreme ultraviolet spectra of laser produced plasmas formed from tin and tin doped planar targets is reported. Spectra have been recorded in the 9–17 nm region from plasmas created by a 700 mJ, 15 ns full width at half maximum intensity, 1064 nm Nd:YAG laser pulse using an absolutely calibrated 0.25 m grazing incidence vacuum spectrograph. The influence of absorption by tin ions (Sn ISn X) in the plasma is clearly seen in the shape of the peak feature at 13.5 nm, while the density of tin ions in the target is also seen to influence the level of radiation in the 9–17 nm region.

Published in:

Journal of Applied Physics  (Volume:99 ,  Issue: 9 )

Date of Publication:

May 2006

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