The carrier transport mechanisms in as-grown LaAlO3 and La2Hf2O7 high-k insulator layers deposited on n- and p-Si were deduced from temperature dependent C-V and I-V characteristics correlated with photoelectric measurements. Large, parallel shifts in the high frequency C-V curves are explained by the presence of a large density of interface states and an approximate analytical formula relating the density of states to the C-V shift is deduced. The space charge limited current is explained by the existence of impurity channels situated energetically near the conduction or valence band of silicon.
Published in:
Journal of Applied Physics
(Volume:99
,
Issue:
6
)
Date of Publication:
Mar 2006
- Page(s):
-
064105
-
064105-9
- ISSN :
-
0021-8979
- Digital Object Identifier :
-
10.1063/1.2180428
- Product Type:
-
Journals & Magazines
- Date of Current Version :
-
18 June 2009
- Issue Date :
-
Mar 2006