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Electrical properties of as-grown molecular beam epitaxy high-k gate dielectrics deposited on silicon

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9 Author(s)
Goldenblum, A. ; National Institute of Materials Physics, Atomistilor Street 105 bis, P.O. Box MG7, Magurele-Bucuresti 77125, Romania ; Pintilie, I. ; Buda, M. ; Popa, A.
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The carrier transport mechanisms in as-grown LaAlO3 and La2Hf2O7 high-k insulator layers deposited on n- and p-Si were deduced from temperature dependent C-V and I-V characteristics correlated with photoelectric measurements. Large, parallel shifts in the high frequency C-V curves are explained by the presence of a large density of interface states and an approximate analytical formula relating the density of states to the C-V shift is deduced. The space charge limited current is explained by the existence of impurity channels situated energetically near the conduction or valence band of silicon.

Published in:
Journal of Applied Physics  (Volume:99 ,  Issue: 6 )

Date of Publication: Mar 2006

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