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Measuring the electron temperature by optical emission spectroscopy in two temperature plasmas at atmospheric pressure: A critical approach

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3 Author(s)
Yanguas-Gil, A. ; Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Sevilla), Dep. Física Atómica, Molecular y Nuclear and Dep. Química Inorgánica (Univ. Sevilla), Av. Americo Vespucio 41092 Sevilla, Spain ; Cotrino, J. ; Gonzalez-Elipe, A.R.

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The measurement of the electron mean kinetic energy by identifying the electron temperature and the excitation temperature obtained by optical emission spectroscopy is theoretically studied for two temperature argon plasmas at atmospheric pressure. Using a 32-level collisional radiative model in which both electron impact and argon-impact inelastic collisions are taken into account, it has been found that under certain conditions the argon inelastic collisions may cause a decrease of the argon excitation temperature so that the relation Te≫Texc≫T0 is satisfied. This inequality also appears when electron losses due to diffusion are important and the electron density is lower than its equilibrium value.

Published in:
Journal of Applied Physics  (Volume:99 ,  Issue: 3 )

Date of Publication: Feb 2006

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