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Browse Journals & Magazines > Journal of Applied Physics ...> Volume:103 Issue:8 Help

Formation mechanisms of ZnO amorphous layers due to thermal treatment of ZnO thin films grown on p-InP (100) substrates

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5 Author(s)
Yuk, J.M. ; Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon 305-701, Republic of Korea ; Lee, J.Y. ; No, Y.S. ; Kim, T.W.
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High-resolution transmission electron microscopy (HRTEM) images, selected-area electron diffraction (SAED) patterns, and energy dispersive x-ray spectroscopy (EDS) profiles showed that P atoms accumulated due to thermal treatment on the top sides and in the heterointerface layers of ZnO thin films grown on p-InP (100) substrates, resulting in the formation of amorphous ZnO layers in the ZnO thin films. The formation mechanisms of the ZnO amorphous layers due to thermal treatment are described on the basis of the HRTEM, the SAED, and the EDS measurements.

Published in:
Journal of Applied Physics  (Volume:103 ,  Issue: 8 )

Date of Publication: Apr 2008

Page(s):
083535 - 083535-4
ISSN :
0021-8979
Digital Object Identifier :
10.1063/1.2908874
Product Type:
Journals & Magazines
Date of Current Version :
18 June 2009
Issue Date :
Apr 2008

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