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Nitrogen effect on the dust presence and behavior in a radio frequency CH4/N2 discharge

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4 Author(s)
Pereira, Jeremy ; LASEP, Faculté des Sciences, Université d’Orléans, Site de Bourges, rue G. Berger, BP 4043, 18028 Bourges Cedex, France ; Massereau-Guilbaud, V. ; Geraud-Grenier, I. ; Plain, A.

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In this paper, we have studied the effects of the nitrogen percentage on particles generated in low pressure radio frequency CH4/N2 discharges. The particle behavior has been analyzed by laser beam extinction and scattering. The nitrogen percentage in the mixture influences the particle presence, behavior, and size in the discharge. For nitrogen percentages greater than 50%, we have evidenced a particle multigeneration and oscillations in particle clouds. These oscillations have been correlated with the discharge electrical parameters.

Published in:

Journal of Applied Physics  (Volume:103 ,  Issue: 3 )