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Controlled fabrication of Cr/Si and Cr/SiGe tubes tethered to insulator substrates

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Ultrathin Si and SiGe films on insulator are used as templates for the fabrication of hybrid metal/semiconductor rolled-up tubes. Structured Cr films are thermally evaporated on SiGe- and Si-on-insulator substrates. The metal/semiconductor bilayers are released from the substrate and formed into rolled-up tubes. The tube diameter is controlled by tuning the metal and the semiconductor layer properties. A cross section of a Cr/SiGe tube is investigated by transmission electron microscopy and electron energy loss spectroscopy.

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Journal of Applied Physics  (Volume:103 ,  Issue: 11 )