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Estimation of the Lyman-α line intensity in a lithium-based discharge-produced plasma source

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4 Author(s)
Masnavi, Majid ; Department of Energy Sciences, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8502, Japan ; Nakajima, Mitsuo ; Hotta, E. ; Horioka, Kazuhiko

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.2827477 

Extreme ultraviolet (EUV) discharge-based lamps for EUV lithography need to generate extremely high power in the narrow spectrum band of 13.5±0.135 nm. A simplified time-dependent collisional-radiative model and radiative transfer solution were utilized to investigate the wavelength-integrated Lyman-α line light outputs in a hydrogen-like lithium ion. The study reveals in particular that a steady-state or magnetically confined lithium plasma radiates in the desired spectrum band not less than 1 kW in 2π sr even at an ion density region as low as 1017 cm-3.

Published in:

Journal of Applied Physics  (Volume:103 ,  Issue: 1 )

Date of Publication:

Jan 2008

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