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High resolution selective multilayer laser processing by nanosecond laser ablation of metal nanoparticle films

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7 Author(s)
Ko, Seung H. ; Laser Thermal Laboratory, Department of Mechanical Engineering, University of California, Berkeley, California 94720-1740, USA ; Pan, Heng ; Hwang, David J. ; Chung, Jaewon
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Ablation of gold nanoparticle films on polymer was explored using a nanosecond pulsed laser, with the goal to achieve feature size reduction and functionality not amenable with inkjet printing. The ablation threshold fluence for the unsintered nanoparticle deposit was at least ten times lower than the reported threshold for the bulk film. This could be explained by the combined effects of melting temperature depression, lower conductive heat transfer loss, strong absorption of the incident laser beam, and the relatively weak bonding between nanoparticles. The ablation physics were verified by the nanoparticle sintering characterization, ablation threshold measurement, time resolved ablation plume shadowgraphs, analysis of ablation ejecta, and the measurement and calculation of optical properties. High resolution and clean feature fabrication with small energy and selective multilayer processing are demonstrated.

Published in:
Journal of Applied Physics  (Volume:102 ,  Issue: 9 )

Date of Publication: Nov 2007

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