Decoupling of silicon carbide optical sensor response for temperature and pressure measurements

Single crystal silicon carbide is a chemically inert transparent material with superior oxidation-resistant properties at elevated temperatures compared to black polycrystalline silicon carbide substrates. These improved properties make crystalline silicon carbide a good optical sensor material for harsh environments such as combustion chambers and turbine systems. Interferometric optical sensors are orders of magnitude more sensitive than electrical sensors and are proposed for these applications. Silicon carbide itself behaves as a Fabry-Pérot etalon eliminating the need for an external interferometer for any measurement using this silicon carbide as a sensor. The principle of the optical sensor in this study is the temperature- and pressure-dependent refractive index of silicon carbide, which can be used to determine the temperatures and pressures of gases that are in contact with silicon carbide. Interference patterns produced by a silicon carbide (4H-SiC) wafer due to multiple reflections of a helium-neon laser beam of wavelength of 632.8 nm have been obtained at temperatures up to 500 °C and pressures up to 600 psi. The pattern changes for the same gas at different temperatures and pressures and for different gases at the same temperature and pressure. The refractive index at the wafer-gas interface is calculated from the interference pattern and the refractive index gradients with respect to temperature and pressure, respectively, are also determined. Decoupling temperature and pressure using these gradients and the measured reflectivity data are discussed in this paper.