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Tube type micro manipulator using shape memory alloy (SMA)

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6 Author(s)
S. Aramaki ; Olympus Opt. Co. Ltd., Tokyo, Japan ; S. Kaneko ; K. Arai ; Y. Takahashi
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A five degrees of freedom tube type micro manipulator has been successfully developed. The manipulator is 1 mm in diameter and 80 mm in length. The SMA (shape memory alloy) plate is applied as an actuator. For integration of electrical components of this manipulator, MIF (multifunction integrated film) has been developed. The MIF is flexible film, which includes heaters, sensors, lead wires and electrodes. This manipulator was controlled with position feedback loop, using the sensor's information

Published in:

Micro Machine and Human Science, 1995. MHS '95., Proceedings of the Sixth International Symposium on

Date of Conference:

4-6 Oct 1995