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〈100〉-textured self-assembled square-shaped polycrystalline silicon grains by multiple shot excimer laser crystallization

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4 Author(s)
He, Ming ; Laboratory of Electronic Components, Technology, and Materials (ECTM), Delft Institute of Microelectronics and Submicron Technology (DIMES), Delft University of Technology, Feldmannweg 17, P.O. Box 5053, 2600 GB Delft, The Netherlands ; Ishihara, Ryoichi ; Metselaar, W. ; Beenakker, K.

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Strong preference for <100> surface and in-plane orientations has been observed in polycrystalline silicon film on SiO2 after crystallization with multiple excimer laser pulses. Laser induced periodic surface structure (LIPSS) is developed in the film, constructing self-assembled square-shaped grains. The clear texture can be observed in a relatively wide energy density window, from 250 to 275 mJ/cm2, for a 30 nm thick α-Si layer. It is speculated that the lateral growth velocity of <100>-oriented grains is the fastest, and the orthogonal in-plane <100> directions are developed due to the alternate directions of melting and solidification during the LIPSS formation.

Published in:

Journal of Applied Physics  (Volume:100 ,  Issue: 8 )