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Quantitative analysis of hydrogenated diamondlike carbon films by visible Raman spectroscopy

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4 Author(s)
Singha, Achintya ; Department of Physics, Indian Institute of Technology Kharagpur, Pin 721302, India ; Ghosh, Aditi ; Roy, Anushree ; Ray, Nihar Ranjan

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The correlations between properties of hydrogenated diamondlike carbon films and their Raman spectra have been investigated. The films are prepared by plasma deposition technique, keeping different hydrogen to methane ratios during the growth process. The hydrogen concentration, sp3 content, hardness, and optical Tauc gap of the materials have been estimated from a detailed analysis of their Raman spectra. We have also measured the same parameters of the films by using other commonly used techniques, such as sp3 content in films by x-ray photoelectron spectroscopy, their Tauc gap by ellipsometric measurements, and hardness by microhardness testing. The reasons for the mismatch between the characteristics of the films, as obtained by Raman measurements and by the above mentioned techniques, have been discussed. We emphasize on the importance of the visible Raman spectroscopy in reliably predicting the above key properties of diamondlike carbon films.

Published in:

Journal of Applied Physics  (Volume:100 ,  Issue: 4 )

Date of Publication:

Aug 2006

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