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Waveguide array electro-optical scanner (WAEOS) technology is presented. Based on the theory of the dielectric slab optical waveguide and the coupled wave equations of infinite waveguide array given by Yariv and Yeh [Optical Waves in Crystals (Wiley, New York, 1983)], the coupled wave equations are modified for adapting the finite waveguide array of the WAEOS. A model of the optical field distribution in the waveguide array is derived, which determines the output field of the WAEOS. Some characteristics of the optical field distribution with uniform incidence and single waveguide incidence are given.