By Topic

Nanoscale patterning of (La,Pr,Ca)MnO3 thin film using atomic force microscopy lithography and their electrical properties

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Yanagisawa, Yoshihiko ; Institute of Science and Industrial Research, Osaka University, 8-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan ; Hirooka, Motoyuki ; Tanaka, Hidekazu ; Kawai, T.

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.2402031 

We have applied the atomic force microscopy (AFM) lithography technique to electrically phase-separated (La,Pr,Ca)MnO3 (LPCMO) thin films. It was found that the maximum pattern height of 10.5 nm for the as-deposited film was much higher than that of 5.3 nm for the annealed film, suggesting that AFM lithography of LPCMO thin film was highly influenced by oxygen nonstoichiometry that enhances ion migration. The nanochannel with 150 nm width was fabricated using this technique. The nanostructure shows insulating behavior under H=0 T and large hysteretic behavior accompanied with metal-insulator transition temperature Tp=140 and 170 K upon cooling and warming under 5 T. In contrast, the unpatterned film has Tp=170 K (H=0 T) and 240 K (H=5 T) without large hysteretic behavior. The difference between the nanochannel and the unpatterned film can be related to the electronic phase separation.

Published in:

Journal of Applied Physics  (Volume:100 ,  Issue: 12 )