By Topic

Ion beam generation from sheath field of grid electrode and its application to surface treatment

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Cho, Yong-Sung ; Electric Power Research Division, Korea Electrotechnology Research Institute, P.O. Box 20, Changwon 641-600, South Korea ; Hae June Lee ; Park, Chung-Hoo ; Lee, Ho-Jun
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.2400390 

As plasma immersion ion implantation using a conducting grid is very useful to reduce the effect of capacitance and charging in surface modification, it is broadly applied in the fields of insulating material implantation. On the other hand, there have been only few attempts to analyze the sheath dynamics including the conducting grid. If the bias voltage applied to the conducting grid is in the range of hundreds of volts for sputtering, or the energy for local restructuring of the atomic arrangement is much lower than voltage for implantation, the surface charge and space charge substantially affect the incident ion energy and ion current to the surface. The formation of the space and surface charges during one bias pulse period are thus analyzed through a one-dimensional and a two-dimensional particle-in-cell simulation. Experiment with the optimally designed grid on the basis of the simulation results is conducted, and the results of both cases with grid and without grid are compared. The improvement of adhesion is yielded by increasing surface roughness and chemical change in the polyurethane treatment using the conducting grid.

Published in:

Journal of Applied Physics  (Volume:100 ,  Issue: 12 )