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Micromachined silicon fuel atomizers for gas turbine engines

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5 Author(s)
A. Singh ; Case Western Reserve Univ., Cleveland, OH, USA ; M. Mehregany ; S. M. Phillips ; R. J. Harvey
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This paper presents results on fabrication and testing of micromachined fuel atomizers for gas turbine engines. Pressure-swirl (simplex) atomizers are batch fabricated by bulk micromachining of silicon using deep reactive-ion-etching (RIE). The atomizers are fabricated as an array, according to a designed experiment, and the influence of the geometric features on the performance of the atomizers is studied. The atomizer design is optimized by a response surface methodology. Finally, a comparative study is done, comparing and contrasting the performance of the silicon atomizers with conventional and metallic atomizers

Published in:

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Date of Conference:

11-15 Feb 1996