Cart (Loading....) | Create Account
Close category search window
 

Mechanical properties of thick, surface micromachined polysilicon films

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

7 Author(s)
Kahn, H. ; Dept. of Mater. Sci. & Eng., Case Western Reserve Univ., Cleveland, OH, USA ; Stemmer, S. ; Nandakumar, K. ; Heuer, A.H.
more authors

Polycrystalline silicon is the most widely used structural material for surface micromachined microelectromechanical systems (MEMS). There are many advantages to using thick polysilicon films; however, due to process equipment limitations, these devices are typically fabricated from polysilicon films less than 3 μm thick. In this work, microelectromechanical test structures were designed and processed from thick (up to 10 μm) undoped and in situ boron-doped polysilicon films. The elastic moduli of the doped films were 150±30 GPa, and appeared to be independent of film thickness. The thermal oxidation of the polysilicon induced a compressive stress into the top surface of the films, which was detected as a residual stress in the polysilicon after the device fabrication was complete. The average nominal fracture toughness of the polysilicon was 2.3±0.1 MPa √m

Published in:

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Date of Conference:

11-15 Feb 1996

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.