By Topic

Response time measurement of electrostatic S-shaped film actuator related to environmental gas pressure conditions

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
M. Shikida ; Dept. of Micro Syst. Eng., Nagoya Univ., Japan ; K. Sato ; K. Takeshita ; S. Suzuki

We have experimentally measured the response time of an electrostatic S-shaped film actuator relative to environmental gas pressure and applied voltage as an aid to the designing of gas valve systems. This actuator has an S-shaped film element whose S-shape propagates in the lateral direction. We experimentally measured the propagation speed of the S-bend continuously from start to stop by detecting the capacitance change between the film and one of the actuator electrode plates. It reached 7 m/s when the pressure was 1 Pa and the applied voltage was 120 V. The response times of the actuator, in which the film travels 5 mm laterally and 2 mm vertically, are 7.7 ms at atmospheric pressure and 2.2 ms at a low pressure of 100 Pa

Published in:

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Date of Conference:

11-15 Feb 1996