Response time measurement of electrostatic S-shaped film actuator related to environmental gas pressure conditions

We have experimentally measured the response time of an electrostatic S-shaped film actuator relative to environmental gas pressure and applied voltage as an aid to the designing of gas valve systems. This actuator has an S-shaped film element whose S-shape propagates in the lateral direction. We experimentally measured the propagation speed of the S-bend continuously from start to stop by detecting the capacitance change between the film and one of the actuator electrode plates. It reached 7 m/s when the pressure was 1 Pa and the applied voltage was 120 V. The response times of the actuator, in which the film travels 5 mm laterally and 2 mm vertically, are 7.7 ms at atmospheric pressure and 2.2 ms at a low pressure of 100 Pa.