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Parameter identification of piezoelectric AlGaN/GaN beam resonators by dynamic measurements

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5 Author(s)
S. Michael ; Institute for Microelectronic and Mechatronic Systems, 98693 Ilmenau, Germany ; K. Brueckner ; F. Niebelschuetz ; K. Tonisch
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A fast identification method which provides the determination of different mechanical parameters of a particular device under test has been investigated for application to micro-electromechanical beam resonators. By performing optical measurements, the frequency-dependent mechanical out-of-plane displacement has been recorded to determine the modal resonant frequencies of a selected resonator. An automated optimization algorithm has been employed which compares the measurement data with the results from finite element simulations to obtain geometric and material characteristics like beam length and intrinsic stress of the devices after fabrication.

Published in:

Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems, 2009. EuroSimE 2009. 10th International Conference on

Date of Conference:

26-29 April 2009