Cart (Loading....) | Create Account
Close category search window
 

α(6H)-SiC pressure sensors for high temperature applications

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Okojie, R.S. ; Kulite Semicond. Products, Leonia, NJ, USA ; Ned, A.A. ; Kurtz, Anthony D. ; Carr, W.N.

A batch-microfabricated 6H-SiC diaphragm-based piezoresistive pressure sensors with working temperature range between 80°F to 500°F had been produced. The net output voltage shows an output voltage of 131.59 mV at full-scale pressure of 1000 psi. The net output voltage response to temperature up to 500°F is also presented. The Temperature Coefficient of Resistance (TCR) of the device exhibits a TCR of -3.07%/100°F at 180°F and eventually becomes a positive value of 4.24%/100°F at 500°F. The Temperature Coefficient of Gage Factor (TCGF) exhibits negative values of -15%/100°F and -10%/100°F at 180°F and 500°F, respectively. The problem of micropipes in 6H-SiC was effectively resolved, making it possible to fabricate thin diaphragms of about 25 μm

Published in:

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Date of Conference:

11-15 Feb 1996

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.