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A multiscale model of mMicro cantilever arrays

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4 Author(s)
Lenczner, M. ; Chemin de l''epitaphe, FEMTO-ST, Besancon ; Pillet, E. ; Cogan, S. ; Hui Hui

We present a simplified model of mechanical behavior of large cantilever arrays with discoupled rows in the dynamic operating regime. Since the supporting bases are assumed to be elastic, cross-talk effect between cantilevers is taken into account. The mathematical derivation combines a thin plate asymptotic theory and the two-scale approximation theory, devoted to strongly heterogeneous periodic systems. The model is not standard, so we present some of its features. We explain how each eigenmode is decomposed into a products of a base mode with a cantilever mode. We explain the method used for its discretization, and report results of its numerical validation with full three-dimensional finite element simulations. Finally, we provide a short description of parameter updating and identification techniques developed for the model.

Published in:

Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems, 2009. EuroSimE 2009. 10th International Conference on

Date of Conference:

26-29 April 2009

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