By Topic

A multiscale model of mMicro cantilever arrays

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Lenczner, M. ; Chemin de l''epitaphe, FEMTO-ST, Besancon ; Pillet, E. ; Cogan, S. ; Hui Hui

We present a simplified model of mechanical behavior of large cantilever arrays with discoupled rows in the dynamic operating regime. Since the supporting bases are assumed to be elastic, cross-talk effect between cantilevers is taken into account. The mathematical derivation combines a thin plate asymptotic theory and the two-scale approximation theory, devoted to strongly heterogeneous periodic systems. The model is not standard, so we present some of its features. We explain how each eigenmode is decomposed into a products of a base mode with a cantilever mode. We explain the method used for its discretization, and report results of its numerical validation with full three-dimensional finite element simulations. Finally, we provide a short description of parameter updating and identification techniques developed for the model.

Published in:

Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems, 2009. EuroSimE 2009. 10th International Conference on

Date of Conference:

26-29 April 2009