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Pull-in curves determined with monolithic FEM models

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2 Author(s)
Stephan D. A. Hannot ; Delft University of Technology, Mekelweg 2, 2628 CD, The Netherlands ; Daniel J. Rixen

This paper gives an overview of the different monolithic approaches to compute the pull-in curve for discretized models of electrostatically actuated microsystems that are currently available in the literature. A method to implement monolithic charge loading combined with path-following is proposed. The performance of the algorithms is tested with some numerical experiments: FEM models of microbeams, used to model micro-switches. The results show that the charge loading scheme provides a fast converging alternative to the traditional path-following approaches. Finally it is shown that the algorithm can be easily extended to handle bifurcations.

Published in:

Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems, 2009. EuroSimE 2009. 10th International Conference on

Date of Conference:

26-29 April 2009