Cart (Loading....) | Create Account
Close category search window
 

A virtual prototype manufacturing software system for MEMS

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
He, Y. ; IntelliSense Corp., Wilmington, MA, USA ; Harris, R. ; Napadenski, G. ; Maseeh, F.

In this paper we report on developments on a computer-aided design software system (IntelliCAD) for prototype development of microelectromechanical systems. The system is designed to fill gaps in micro-manufacturing know-how by linking performance modeling to manufacturing (machine) parameters. The architecture is self-contained, completely integrated and allows modification for user applications. IntelliCAD's integration is accomplished by an architecture different from a previously reported academic system (1990). The architecture has integrated mask layout, a material database, a fabrication database, process simulation, backward process parameter optimization at each fabrication step, a process debugger, a 3D solid modeler, and parametric electrostatic, mechanical, thermomechanical and electro-mechanical analysis

Published in:

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Date of Conference:

11-15 Feb 1996

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.