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Development of an offline x‐ray photoelectron spectroscopic personal computer‐based data analysis system

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1 Author(s)
McCaslin, Paul C. ; Unocal Corporation, Brea, California 92621

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Although the majority of x‐ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) instruments are interfaced to a computer upon which spectral analyses can be carried out, it is often convenient to be able to perform data analysis offline. This capability is especially desirable when one is faced with an outdated and/or slow analysis package associated with the XPS/AES instrument. Rather than upgrade the data system at an often considerable expense, one may choose to adopt an analysis package which is essentially instrument independent. Such a data analysis system has been developed. Its features include: spectral comparison (including addition and subtraction); several types of background signal generation; position and intensity data from cursor input; x‐ or y‐axis expansion; calculation of FWHMs, areas, and precise peak maxima; spectral smoothing and differentiation; labelling facilities; XPS line library searches by element or cursor position; display of data collection statistics and run title; x‐ray satellite line subtraction; channel intensity editing; x‐axis shifting to account for charging; and a least‐squares curve‐fitting routine. Its ability to analyze XPS and AES spectra on a routinely available personal computer makes it an ideal package to serve as a front end for examining data files stored in a standardized format.

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:9 ,  Issue: 3 )

Date of Publication:

May 1991

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