Cart (Loading....) | Create Account
Close category search window
 

Fiber optic sensor for substrate temperature monitoring

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Yeh, Yunhae ; Department of Electrical Engineering, Texas A&M University, College Station, Texas 77843 ; Lee, Chung E. ; Atkins, Robert A. ; Gibler, William N.
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.576572 

The use of an optical fiber Fabry–Perot interferometric temperature sensor for monitoring substrate temperature in a rf sputtering system is demonstrated. The sensor head consists of a continuous length of single mode silica fiber which contains two internal mirrors a distance of 1.08 cm apart to form the interferometer cavity. The laser light source for the sensor is located outside the vacuum system and connected to the sensor head via a fiber optic feedthrough. The accuracy of the sensor was 0.05 °C in this experiment, but considerable improvement is possible with better signal averaging techniques. The fiber optic sensor provided substrate temperature information during rf plasma excitation, when a nearby thermocouple ceased to function due to electromagnetic interference.

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:8 ,  Issue: 4 )

Date of Publication:

Jul 1990

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.