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Fiber optic sensor for substrate temperature monitoring

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5 Author(s)
Yeh, Yunhae ; Department of Electrical Engineering, Texas A&M University, College Station, Texas 77843 ; Lee, Chung E. ; Atkins, Robert A. ; Gibler, William N.
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The use of an optical fiber Fabry–Perot interferometric temperature sensor for monitoring substrate temperature in a rf sputtering system is demonstrated. The sensor head consists of a continuous length of single mode silica fiber which contains two internal mirrors a distance of 1.08 cm apart to form the interferometer cavity. The laser light source for the sensor is located outside the vacuum system and connected to the sensor head via a fiber optic feedthrough. The accuracy of the sensor was 0.05 °C in this experiment, but considerable improvement is possible with better signal averaging techniques. The fiber optic sensor provided substrate temperature information during rf plasma excitation, when a nearby thermocouple ceased to function due to electromagnetic interference.

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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:8 ,  Issue: 4 )