Cart (Loading....) | Create Account
Close category search window

The effects of alloying on stress induced void formation in aluminum‐based metallizations

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

7 Author(s)
Ryan, J.G. ; IBM General Technology Division, Essex Junction, Vermont 05452 ; Riendeau, J.B. ; Shore, S.E. ; Slusser, G.J.
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link: 

Evaporated metallizations composed of aluminum alloys and titanium underlayers were patterned, passivated with plasma enhanced chemical vapor deposited SiNx and aged for 1000 h at 150 °C in order to observe stress‐induced void formation. Metal films were analyzed using scanning electron microscopy, transmission electron microscopy, and secondary ion mass spectrometry. The addition of copper to aluminum results in fewer voids than in comparable noncopper metallizations. For Al–Cu films, fewer voids were observed in 1.5 μm lines compared to 5 μm lines, apparently due to the presence of greater stress gradients in the wide line case. Silicon appears to promote void formation by rapid grain boundary diffusion to precipitates. Oxygen incorporation in aluminum produces small grained films, thereby generating many void nucleation sites. High oxygen concentrations produce films with a few long, channel‐like voids and many small voids. Titanium underlayers decrease the percent of metal volume voided for Al and AlSi films, while for AlCu films, the percentage void area and the average void size are increased. Volume reduction associated with interfacial TiAl3 formation may be responsible for the increase in void size associated with titanium underlayers.

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:8 ,  Issue: 3 )

Date of Publication:

May 1990

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.