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Electron stimulated desorption effects in secondary ion emission from BF+2 implanted SiO2

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2 Author(s)
Lanzillotto, A‐M. ; David Sarnoff Research Center, Princeton, New Jersey 08543‐05300 ; Magee, C.W.

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The effect of electron stimulated desorption (ESD) during secondary ion mass spectrometry (SIMS) from BF+2 implanted SiO2 was investigated. We have quantitatively illustrated that the F+ depth profile is directly related to electron current density while the Si+ and B+ profiles remain nearly constant. We have also determined that ESD produces the same ionic species as does Ar+ bombardment. A mass analysis of ESD species from BF+2 implanted SiO2 has revealed a very extensive ionization from this surface. In addition to F+ , a significant abundance of Si+ , Si+2 , Si+3, and SiO+ ESD was also detected.

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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:8 ,  Issue: 2 )