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SHF-range surface acoustic wave interdigital transducers using electron beam exposure

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3 Author(s)
Yamanouchi, K. ; Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan ; Cho, Y. ; Meguro, T.

Nanometer electrodes of 0.085-μm width have been fabricated using direct electron beam lithography, normal lift-off techniques, and an I2-plasma cleaning system. These techniques have been applied to interdigital transducers used as surface acoustic wave (SAW) transducers in the SHF range. SAW filters experiments were performed in the SHF-range. Filters with minimum insertion loss of 15.0 dB at the center frequency of 5 GHz and 24 dB at 11 GHz were obtained

Published in:

Ultrasonics Symposium, 1988. Proceedings., IEEE 1988

Date of Conference:

2-5 Oct 1988