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The angle‐resolved signal ratio (AR/SR) technique of nondestructive measurement on shallow depth profiles of analytes in flat and smooth‐surfaced samples has been developed earlier for use in quantitative x‐ray fluorescence spectroscopy (XFS). The principles of the method have since been successfully applied also in electron beam microanalysis and x‐ray photoelectron spectroscopy. The application in Auger electron spectroscopy is under study. The AR/SR technique can provide quantitative information on the type of depth profile, the centroid depth, the cumulative amount of analyte, and sometimes also on symmetrical profile broadening (by diffusion). The last three items of information are investigated for their dependence on measuring geometry as well as excitation function and/or attenuation coefficients of exciting and excited radiation. General conclusions are drawn from sample calculations for selected cases investigated by AR/SR/XFS.