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The friction and wear properties for thin films of carbon with diamond structure, prepared by ionized deposition, slid with copper have been examined in a pressure range of 5×10-4 to 105 Pa. The friction coefficient shows a tendency to decrease with the increase of pressure and it is ≪0.2 because the surfaces of thin films of carbon with diamond structure are very smooth. The specific wear rate of copper sliders decreases as the pressure becomes lower. However, no wear is detected on thin films of carbon with diamond structure.