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The effect of gas scattering on the deposition profile of optical thin films

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2 Author(s)
Hansen, G.L. ; Honeywell Inc., Minneapolis, Minnesota 55413 ; Ahonen, R.G.

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A Monte Carlo simulation is presented which represents the effects of gas scattering and mask design on the deposition profile of optical thin films. The results verify that gas scattering can be a primary cause of the convex profile seen on multilayer dielectric coatings. The model also predicts shifts in wavelength centering which can be seen in real optics. The fit of the theory to data is qualitatively good, but the model tends to underestimate the amount of real curvature. This difference may be attributed to the simplicity of the assumptions used in the calculations.

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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:5 ,  Issue: 5 )