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Increased reliability when pumping reactive gases, due to monitoring of vacuum pump and accessories

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1 Author(s)
Berges, Hanns‐Peter ; Leybold–Heraeus, P.O. 510 760, D‐5000, Cologne 51, Federal Republic of Germany

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Modern standard forepumps are designed for versatile uses. In recent years such applications have increased in importance, for example, in semiconductor production, where reactive gases have to be pumped. In the forepump, these gases are compressed against atmosphere causing not only high pressures, but high temperatures and increased concentrations. This could lead to problems which could make the pump unreliable. The demands made on the vacuum pump, the sealing fluid, and accessories to prevent such problems are described. The design and function of such a forevacuum system is explained, using an example. Monitoring and supervision of the backing system is necessary to increase the reliability. Modular accessories make possible not only optimum adaptation to the different processes, but also central monitoring which can be extended to include automation using a computer. This monitoring system gives warning not only of possible defects, but also of service work that must be carried out. Thus the maintenance work can be effected at a more suitable time, production is not affected, and the operation reliability of the pump system is increased. Even if there is a failure, the charge can usually be completed.

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:5 ,  Issue: 4 )