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Coatings in the Cr–C binary system are deposited by reactive physical vapor deposition. Two types of deposition were used in an argon–methane atmosphere: chromium reactive evaporation by arc discharge and rf reactive sputtering. The objective of the study is to determine the nature and structure of the deposits as a function of deposition parameters before and after annealing. Phases are identified by x‐ray diffraction. Deposit morphology is observed, both on the surface and in fractography, by scanning electron microscopy. A more particular study of coating structure, for a given configuration of deposition parameters, was conducted using transmission electron microscopy.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (Volume:3 , Issue: 6 )
Date of Publication: Nov 1985