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Constant power operation of incandescent micromachined polysilicon microresistors for use as vacuum pressure sensors

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3 Author(s)
Kleckner, T.C. ; Department of Electrical and Computer EngineeringAlberta Microelectronic Centre, University of Alberta, Edmonton, Alberta T6G 2G7, Canada ; Lawson, R.P.W. ; Robinson, A.M.

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As a proof of concept study, a micromachined polysilicon resistor was used as a vacuum pressure sensor. The resistor was heated to incandescence and operated with a constant electrical power input. A photodiode monitored light intensity changes as the pressure of the surrounding nitrogen gas was varied over the pressure range of 10-2–104Pa. This optical method to measure pressure was nine times more sensitive than one based on electrical resistance variations. This measurement method is thus both more sensitive and it operates over a large pressure range than conventional thermal conductivity sensors. © 1997 American Vacuum Society.

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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:15 ,  Issue: 5 )