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Evaluation of low cost residual gas analyzers for ultrahigh vacuum applications

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2 Author(s)
Rao, M.G. ; Thomas Jefferson National Accelerator Facility, Newport News, Virginia 23606 ; Dong, C.

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In recent years several low cost computer controlled residual gas analyzers (RGAs) have been introduced into the market place. It would be very useful to know the performance character- istics of these RGAs in order to make an informed selection for UHV applications. The UHV applications include extreme sensitivity helium leak detection and monitoring of the residual gas spectra in UHV systems. In this article, the sensitivity and linearity data for nitrogen, hydro-gen, and helium are presented in the pressure range 10-8–10-1 Pa. Further, the relationships between focus voltage and ion currents, relative sensitivity, and fragmentation factor are also included. A direct comparison method is used in obtaining this data. Spinning rotor and extractor gauges are the transfer standard gauges used in Jefferson Lab’s vacuum calibration facility, with which all the reported measurements here were carried out. © 1997 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:15 ,  Issue: 3 )