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Polarized Raman spectroscopy is used to measure the hydrostatic and axial stress components along the  and  direction of a 2-in.-diam polycrystalline diamond film showing mainly  and  facets. The theoretical background and the instrumentation necessary to measure stress and crystal orientation are presented. Experimental examples of a  oriented single crystal having uniaxial stress along the  direction, as well as a  oriented single crystal having uniaxial stress along the  direction, are presented. The diamond Raman peak height and shift indicating hydrostatic stress are measured at 1776 different locations across the entire film. The hydrostatic stress, the axial stress along the  direction, and the axial stress along the  direction of 441 neighboring crystals of a center portion of the film are also determined. The results show a very clustered distribution of the hydrostatic and axial stress with a variation of up to 0.8 GPa. © 1997 American Vacuum Society.