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Determination of the components of stress in a polycrystalline diamond film using polarized Raman spectroscopy

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2 Author(s)
Mossbrucker, J. ; Michigan State University, East Lansing, Michigan 48824 ; Grotjohn, T.A.

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Polarized Raman spectroscopy is used to measure the hydrostatic and axial stress components along the [111] and [100] direction of a 2-in.-diam polycrystalline diamond film showing mainly [111] and [110] facets. The theoretical background and the instrumentation necessary to measure stress and crystal orientation are presented. Experimental examples of a [111] oriented single crystal having uniaxial stress along the [111] direction, as well as a [100] oriented single crystal having uniaxial stress along the [100] direction, are presented. The diamond Raman peak height and shift indicating hydrostatic stress are measured at 1776 different locations across the entire film. The hydrostatic stress, the axial stress along the [100] direction, and the axial stress along the [111] direction of 441 neighboring crystals of a center portion of the film are also determined. The results show a very clustered distribution of the hydrostatic and axial stress with a variation of up to 0.8 GPa. © 1997 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:15 ,  Issue: 3 )

Date of Publication:

May 1997

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