Low contamination ultrahigh vacuum system of the Synchrotron Radiation Research Center 1.3 GeV electron storage ring

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The vacuum system of the Synchrotron Radiation Research Center 1.3 GeV electron storage ring was designed as a low contamination ultrahigh vacuum system. In addition to the standard treatments for the ultrahigh vacuum components, several contamination reduction methods, such as oil‐free machining processes, completely oil‐free pumping systems, and dust‐controlled installation processes, were adopted in the manufacturing processes. The benefits of the low‐contamination treatments were verified by the resultant fast‐beam cleanup, low degree of dust trapping, and low partial pressures of the carbonaceous residual gases in the vacuum system. © 1995 American Vacuum Society

Published in:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (Volume:13 , Issue: 5 )

Date of Publication: Sep 1995

Page(s):: 2569 - 2573
ISSN :: 0734-2101
Digital Object Identifier :: 10.1116/1.579451
Product Type:: Journals & Magazines

Date of Current Version :: 18 June 2009
Issue Date :: Sep 1995

Author(s)

Hsiung, G.Y.
Synchrotron Radiation Research Center, Hsinchu Science‐Based Industrial Park, Hsinchu, Taiwan 300, Republic of China
Huang, J.R. ; Wang, D.J. ; Shyy, J.G. ; Lee, J.C. ; Sheu, R.J. ; Tzeng, H.S. ; Hsu, S.N. ; Perng, S.Y. ; Hsiao, K.M. ; Wey, W.D. ; Chen, J.R. ; Liu, Y.C.