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Performance of an ionization gauge with a large‐angle ion deflector. I. Total pressure measurement in extreme high vacuum

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2 Author(s)
Oshima, C. ; Kagami Memorial Laboratory for Material Science and Technology, Waseda University, Nishiwaseda, Shinjuku, 160, Japan ; Otuka, A.

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Performance of the ionization gauge with a large‐angle ion deflector (254.6°) has been examined in extreme high vacuum. We have estimated 4×10-13 Pa to be the lowest measurable limit of the gauge due to soft x‐ray noise (1‐min period of measurement) and to be less than 2×10-13 Pa for electron stimulated desorption ion noise. The sensitivity of the gauge was 0.018 Pa-1 for hydrogen. By use of a channeltron multiplier for ion detection, the sensitivity of the gauge is improved: hence, a pressure of ∼3×10-11 Pa is easily measured at an emission current ≪0.1 mA. Deviation from the linear relation of ion current versus emission, allows outgassing from the gauge to be detected.

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:12 ,  Issue: 6 )

Date of Publication:

Nov 1994

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