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Performance of the ionization gauge with a large‐angle ion deflector (254.6°) has been examined in extreme high vacuum. We have estimated 4×10-13 Pa to be the lowest measurable limit of the gauge due to soft x‐ray noise (1‐min period of measurement) and to be less than 2×10-13 Pa for electron stimulated desorption ion noise. The sensitivity of the gauge was 0.018 Pa-1 for hydrogen. By use of a channeltron multiplier for ion detection, the sensitivity of the gauge is improved: hence, a pressure of ∼3×10-11 Pa is easily measured at an emission current ≪0.1 mA. Deviation from the linear relation of ion current versus emission, allows outgassing from the gauge to be detected.